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SECURITIES AND EXCHANGE COMMISSION
Washington, D.C. 20549
____________________
Schedule 13G
(Rule 13d-102)
INFORMATION TO BE INCLUDED IN STATEMENTS FILED PURSUANT
TO RULES 13d-1(b) AND (c) AND AMENDMENTS THERETO
FILED PURSUANT TO 13d-2(b)
(Amendment No. )
ULTRATECH STEPPER, INC.
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(Name of Issuer)
COMMON STOCK
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(Title of Class of Securities)
904034 10 5
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(CUSIP Number)
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CUSIP NO. 904034 10 5 13G Page 2 of 5 Pages
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1 NAME OF REPORTING PERSONS
S.S. OR I.R.S. IDENTIFICATION NOS. OF ABOVE PERSONS
ARTHUR W. ZAFIROPOULO
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2 CHECK THE APPROPRIATE BOX IF A MEMBER OF A GROUP*
(a) (b)
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3 SEC USE ONLY
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4 CITIZENSHIP OR PLACE OF ORGANIZATION
UNITED STATES
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5 SOLE VOTING POWER
NUMBER 1,740,719 SHARES
OF -------------------------------------------------------------
6 SHARED VOTING POWER
SHARES
None
BENEFICIALLY -------------------------------------------------------------
OWNED BY
7 SOLE DISPOSITIVE POWER
REPORTING
1,740,719 SHARES
PERSON -------------------------------------------------------------
WITH
8 SHARED DISPOSITIVE POWER
None
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9 AGGREGATE AMOUNT BENEFICIALLY OWNED BY EACH REPORTING
PERSON
1,740,719
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10 CHECK BOX IF THE AGGREGATE AMOUNT IN ROW (9) EXCLUDES
CERTAIN SHARES* / /
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11 PERCENT OF CLASS REPRESENTED BY AMOUNT IN ROW 9
8.4%
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12 TYPE OF REPORTING PERSON*
IN
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*SEE INSTRUCTIONS BEFORE FILLING OUT!
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CUSIP NO. 904034 10 5 Page 3 of 5 Pages
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ATTACHMENT TO SCHEDULE 13G
Item 1(a) NAME OF ISSUER:
Ultratech Stepper, Inc.
Item 1(b) ADDRESS OF ISSUER'S PRINCIPAL EXECUTIVE OFFICES:
3050 Zanker Road
San Jose, CA 95134
Item 2(a) NAME OF PERSON FILING:
Arthur W. Zafiropoulo
Item 2(b) ADDRESS OF PRINCIPAL BUSINESS OFFICE OR RESIDENCE:
c/o Ultratech Stepper, Inc.
3050 Zanker Road
San Jose, CA 95134
Item 2(c) CITIZENSHIP: U.S.A.
Item 2(d) TITLE AND CLASS OF SECURITIES: Common Stock
Item 2(e) CUSIP NUMBER: 904034 10 5
Item 3 NOT APPLICABLE.
Item 4 OWNERSHIP
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CUSIP NO. 904034 10 5 Page 4 of 5 Pages
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Item 4(a) AMOUNT BENEFICIALLY OWNED:
1,740,719 Shares of Common Stock
Item 4(b) PERCENT OF CLASS:
8.4%
Item 4(c) NUMBER OF SHARES AS TO WHICH SUCH PERSON HAS:
(i) sole power to vote or to direct the vote:
1,740,719 */
(ii) shared power to vote or to direct the vote:
None.
(iii) sole power to dispose or to direct the disposition of:
1,740,719 **/ shares of Common Stock
(iv) shared power to dispose or to direct the disposition of:
None.
Item 5 NOT APPLICABLE.
Item 6 NOT APPLICABLE.
Item 7 NOT APPLICABLE.
Item 8 NOT APPLICABLE.
Item 9 NOT APPLICABLE.
*/Includes 100,000 shares held by a charitable foundation in the name of
the "Zafiropoulo Family Foundation" established pursuant to Section 501(c)(3)
of the Internal Revenue Code of 1986, as amended, of which the Reporting
Person has voting or dispositive power only to the extent that he is on the
board of directors of the foundation.
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CUSIP NO. 904034 10 5 Page 5 of 5 Pages
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Item 10 CERTIFICATION: By signing below I certify that, to the best of my
knowledge and belief, the securities referred to above were acquired
in the ordinary course of business and were not acquired for the
purpose of and do not have the effect of changing or influencing the
control of the issuer of such securities and were not acquired in
connection with or as a participant in any transaction having such
purposes or effect.
SIGNATURE
After reasonable inquiry and to the best of my knowledge and belief, I certify
that the information set forth in this statement is true, complete and correct.
February 6, 1998
/s/ Arthur W. Zafiropoulo
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Arthur W. Zafiropoulo
Chief Executive Officer
