SEMITOOL INC
DEF 14A, 1997-01-21
SPECIAL INDUSTRY MACHINERY, NEC
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                                  SCHEDULE 14A

                                 (Rule 14a-101)

                     INFORMATION REQUIRED IN PROXY STATEMENT

                            SCHEDULE 14A INFORMATION

           Proxy Statement Pursuant to Section 14(a) of the Securities

                      Exchange Act of 1934 (Amendment No. )

Filed by the Registrant |X| Filed by a party other than the Registrant |_| 
Check the appropriate box:
|_|  Preliminary proxy statement          |_|  Confidential,  For Use
                                              of the  Commission  
|X|  Definitive  proxy  statement Only (as permitted by Rule 14a-6(e)(2))
|_|  Definitive   additional  materials  
|_|  Soliciting  material
     pursuant to Rule 14a-11(c) or Rule 14a-12

                                 Semitool, Inc.
                (Name of Registrant as Specified in Its Charter)

                                 Semitool, Inc.
    (Name of Person(s) Filing Proxy Statement, if Other Than the Registrant)


Payment of Filing Fee (Check the appropriate box):
|X|    No fee required.
|_| Fee computed on table below per Exchange Act Rules 14a-6(i)(1) and 0-11.


(1)    Title of each class of securities to which transaction applies:


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(2)    Aggregate number of securities to which transactions applies:


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(3)    Per unit price or other underlying value of transaction computed pursuant
       to  Exchange  Act Rule 0-11 (set forth the amount on which the filing fee
       is calculated and state how it was determined):



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(4)    Proposed maximum aggregate value of transaction.


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(5)    Total fee paid:


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       |_|  Fee paid previously with preliminary materials:


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       |_| Check box if any part of the fee is offset as  provided  by  Exchange
Act Rule  0-11(a)(2)  and identify the filing for which the  offsetting  fee was
paid previously.  Identify the previous filing by registration statement number,
or the form or schedule and the date of its filing.


(1)    Amount previously paid:

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(2)    Form, Schedule or Registration Statement No.:

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(3)    Filing Party:

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(4)    Date Filed:

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<PAGE>


                                 SEMITOOL, INC.
- --------------------------------------------------------------------------------
                    Notice of Annual Meeting of Shareholders
                          To Be Held February 13, 1997


To the Shareholders of Semitool, Inc.:


NOTICE IS HEREBY  GIVEN that the Annual  Meeting of  Shareholders  of  Semitool,
Inc., a Montana  corporation (the  "Company"),  will be held at the Best Western
Outlaw Inn, 1701 Highway 93 South, Kalispell, Montana 59901, at 2:30 p.m., local
time, on February 13, 1997, for the following purposes:


1. ELECTION OF DIRECTORS.  To elect five directors of the Company to serve until
the 1998 Annual Meeting of  Shareholders  or until their  successors are elected
and qualified.

2. APPROVAL AND  RATIFICATION  OF THE AMENDED AND RESTATED  SEMITOOL,  INC. 1994
STOCK  OPTION PLAN,  AS AMENDED.  To ratify and approve the Amended and Restated
Semitool,  Inc.  1994 Stock Option Plan,  as amended,  to increase the number of
shares of Common Stock available for issuance  thereunder by 200,000 shares from
900,000 shares to 1,100,000 shares.


3.  RATIFICATION  OF  APPOINTMENT  OF  INDEPENDENT   AUDITORS.   To  ratify  the
appointment of Coopers &  Lybrand  L.L.P.  as the  independent  auditors for the
Company for the fiscal year ending September 30, 1997.


4. OTHER  BUSINESS.  To transact such other business as may properly come before
the Annual Meeting of Shareholders and any adjournment or postponement thereof.


The foregoing  items of business are more fully described in the Proxy Statement
which is attached hereto and made a part hereof.


The Board of Directors has fixed the close of business on January 6, 1997 as the
record date for determining the  shareholders  entitled to notice of and to vote
at the 1997 Annual Meeting of  Shareholders  and any adjournment or postponement
thereof.


WHETHER  OR NOT YOU  EXPECT TO ATTEND THE  ANNUAL  MEETING  OF  SHAREHOLDERS  IN
PERSON,  YOU ARE URGED TO MARK, SIGN, DATE AND RETURN THE ENCLOSED PROXY CARD AS
PROMPTLY  AS POSSIBLE IN THE  POSTAGE-PREPAID  ENVELOPE  PROVIDED TO ENSURE YOUR
REPRESENTATION  AND THE PRESENCE OF A QUORUM AT THE ANNUAL MEETING.  IF YOU SEND
IN YOUR  PROXY CARD AND THEN  DECIDE TO ATTEND  THE ANNUAL  MEETING TO VOTE YOUR
SHARES IN PERSON,  YOU MAY STILL DO SO. YOUR PROXY IS  REVOCABLE  IN  ACCORDANCE
WITH THE PROCEDURES SET FORTH IN THE PROXY STATEMENT.


                                             By Order of the Board of Directors,




                                            /s/Raymon F. Thompson
                                            Raymon F. Thompson
                                            Chairman of the Board,
                                            Chief Executive Officer and
                                            President
Kalispell, Montana
January 21, 1997



<PAGE>


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               Mailed to Shareholders on or about January 21, 1997




                                 SEMITOOL, INC.


                             655 West Reserve Drive
                            Kalispell, Montana 59901


                                 PROXY STATEMENT


General Information


This Proxy  Statement  is  furnished to the  shareholders  of Semitool,  Inc., a
Montana corporation (the "Company"),  in connection with the solicitation by the
Board of  Directors  of the Company  (the  "Board" or "Board of  Directors")  of
proxies in the accompanying form for use in voting at the 1997 Annual Meeting of
Shareholders  of the Company (the  "Annual  Meeting") to be held on February 13,
1997,  at the Best  Western - Outlaw  Inn,  1701  Highway  93 South,  Kalispell,
Montana 59901,  at 2:30 p.m.,  local time, and any  adjournment or  postponement
thereof. The shares represented by the proxies received, properly marked, dated,
executed and not revoked will be voted at the Annual Meeting.


Revocability of Proxies


Any proxy  given  pursuant  to this  solicitation  may be  revoked by the person
giving it at any time before it is  exercised by  delivering  to the Company (to
the  attention of John W.  Sullivan) a written  notice of  revocation  or a duly
executed  proxy  bearing a later date,  or by attending  the Annual  Meeting and
voting in person.


Solicitation and Voting Procedures


The  solicitation of proxies will be conducted by mail and the Company will bear
all  attendant  costs.  These costs will  include the expense of  preparing  and
mailing  proxy  materials  for the Annual  Meeting  and  reimbursements  paid to
brokerage   firms  and  others  for  their   expenses   incurred  in  forwarding
solicitation  material  regarding the Annual Meeting to beneficial owners of the
Company's Common Stock. The Company may conduct further solicitation personally,
by  telephone  or by  facsimile  through  its  officers,  directors  and regular
employees,  none of whom will receive additional compensation for assisting with
such solicitation.


The close of  business on January 6, 1997 has been fixed as the record date (the
"Record  Date") for  determining  the  holders of shares of Common  Stock of the
Company entitled to notice of and to vote at the Annual Meeting. As of the close
of business on the Record Date, the Company had approximately  13,662,727 shares
of Common  Stock  outstanding  and entitled to vote at the Annual  Meeting.  The
presence at the Annual  Meeting of a majority of these shares of Common Stock of
the  Company,  either in person or by proxy,  will  constitute  a quorum for the
transaction of business at the Annual Meeting.  Each outstanding share of Common
Stock  on the  Record  Date is  entitled  to one (1) vote on all  matters.  With
respect to the election of directors,  each  shareholder is entitled to cumulate
his or her votes,  meaning  that such  shareholder  can  multiply  the number of
shares owned by the number of board  positions to be filled,  and allocate  such
votes for all or as many director-nominees as he or she may designate.


Abstentions and broker  non-votes are each included in the  determination of the
number of shares present and voting,  but will not be counted for or against any
of the proposals to be voted upon at the meeting.




<PAGE>


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                                 PROPOSAL NO. 1

                              ELECTION OF DIRECTORS


As set by the Board of  Directors  pursuant  to the Bylaws of the  Company,  the
authorized number of directors is set at five. Five directors will be elected at
the Annual  Meeting to serve until the 1998 Annual  Meeting of  Shareholders  or
until their  successors  are elected or  appointed  and  qualified  or until the
director's earlier  resignation or removal. In the event that any nominee of the
Company is unable or  declines  to serve as a director at the time of the Annual
Meeting,  the proxies will be voted for any nominee who shall be  designated  by
the present Board of Directors to fill the vacancy. In the event that additional
persons are  nominated for election as  directors,  the proxy holders  intend to
vote all proxies received by them in such a manner,  as will assure the election
of as many of the nominees  listed below as  possible,  and, in such event,  the
specific  nominees to be voted for will be determined by the proxy holders.  The
Board has no reason to believe  that the  persons  named below will be unable or
unwilling to serve as a nominee or as a director,  if elected.  Each of the five
nominees for director who receives the greatest number of votes will be elected.


Set forth below is the age and certain biographical  information relating to the
director nominees.


Raymon F.  Thompson,  age 55,  founded the  Company and has served as  Chairman,
Chief Executive  Officer and President since its inception in 1979. In 1979, Mr.
Thompson  designed,  patented and introduced the first on-axis  rinser/dryer for
the semiconductor industry.


Howard E. Bateman,  age 62, has served on the Company's Board of Directors since
1990. Mr. Bateman  formerly owned and operated  Entech,  a Pennsylvania  company
that was an independent  sales  representative  for the Company's  products from
1979 to 1996.


Richard A. Dasen,  age 54, has served on the Company's  Board of Directors since
1984. From 1974 to 1992, Mr. Dasen owned and managed Evergreen Bancorporation, a
multi-bank  holding  company.  Since  1992,  Mr.  Dasen has been an  independent
businessman.


Daniel J. Eigeman,  age 62, has served on the Company's Board of Directors since
1985.  From 1971 to 1993,  Mr.  Eigeman was President of Eigeman,  Hanson & Co.,
P.C.,  CPAs,  and  since  1993 has been Vice  President  of  Junkermier,  Clark,
Campanella,  Stevens, P.C., CPAs. Mr. Eigeman served as President of the Montana
Society of Certified Public Accountants in 1993.


Calvin S. Robinson, age 76, has served on the Company's Board of Directors since
1982 and since  February  of 1996 has  served as the  Company's  Secretary.  Mr.
Robinson has been of counsel to Murphy,  Robinson,  Heckathorn & Phillips,  P.C.
since 1989. This firm has provided legal services to the Company since 1979. Mr.
Robinson is also a director of Winter Sports, Inc.


                         THE BOARD RECOMMENDS A VOTE FOR
                    THE ELECTION OF THE NOMINEES NAMED ABOVE.



Relationships Among Directors or Executive Officers


There  are no  family  relationships  among any of the  directors  or  executive
officers of the Company, except that Steven R. Thompson, a vice president of the
Company, is the son of Raymon F. Thompson.


Meetings and Committees of the Board of Directors


During the fiscal year ended  September 30, 1996, the Board met four times.  The
Board has three  committees:  the Audit  Committee,  the  Compensation and Stock
Option  Committee  and the  Nominating  Committee.  During the fiscal year ended
September 30, 1996, no director  attended  fewer than 75% of all the meetings of
the Board and its  committees on which he served after  becoming a member of the
Board.


The Audit  Committee,  which  held  three  meetings  in the  fiscal  year  ended
September 30, 1996,  consisted of Messrs.  Dasen,  Eigeman and Poppa.  The Audit
Committee  reviews and supervises the Company's  financial  controls,  including
selecting  the  Company's  auditors,  reviewing  the books and  accounts  of the
Company,  meeting  with the  officers of the  Company  regarding  the  Company's
financial  controls,  acting upon  recommendations  of auditors  and taking such
further action as the Audit  Committee  deems  necessary to complete an audit of
the books and accounts of the Company,  as well as other  matters which may come
before it or as directed by the Board.


The  Compensation  and Stock Option  Committee,  which held five meetings in the
fiscal year ended September 30, 1996, consists of Messrs.  Bateman and Robinson.
The  Compensation   and  Stock  Option   Committee   reviews  and  approves  the
compensation and benefits for the Company's executive officers,  administers the
Company's  stock option plan and performs  such other duties as may from time to
time be determined by the Board.


The Nominating Committee,  which consists of Messrs.  Bateman and Thompson,  was
appointed by the Board of Directors in November  1996 and therefore did not hold
any  meetings  in the fiscal  year ended  September  30,  1996.  The  Nominating
Committee  nominates  directors  to hold office for the  ensuing  year and until
their  respective  successors  are duly elected and  qualified.  The  Nominating
Committee may consider  recommendations from shareholders if received in writing
addressed  to the  Secretary  of the Company no later than 120 days prior to the
12-month anniversary of the previous annual meeting of shareholders.


Compensation of Directors


Upon becoming a member of the Board, non-employee directors receive options (the
"Initial  Option  Grants")  to  purchase  3,000  shares  of  Common  Stock,  and
thereafter  receive an annual  option  grant (the  "Annual  Option  Grants")  to
purchase  2,000 shares of Common  Stock.  The Company's  non-employee  directors
receive a $1,000  monthly fee,  $1,000 for each Board meeting  attended and $500
for each committee meeting attended that is not held in conjunction with a Board
meeting.  All  non-employee  directors are reimbursed  for expenses  incurred in
connection  with  attending  meetings of the Board.  Employee  directors  of the
Company do not receive compensation for their services as directors.





<PAGE>


                              SECURITY OWNERSHIP OF
                    CERTAIN BENEFICIAL OWNERS AND MANAGEMENT


The  following  table  sets  forth  certain  information  with  respect  to  the
beneficial ownership of the Company's Common Stock as of the Record Date for (i)
each person who is known by the Company to beneficially  own more than 5% of the
Common Stock, (ii) each of the Company's  directors,  (iii) each of the officers
appearing in the Summary  Compensation  Table below and (iv) all  directors  and
executive officers as a group.

<TABLE>
<S>                                                                 <C>                            <C>

                                                                         Shares Beneficially Owned
                                                              -------------------------------------------------
  Directors, Executive Officers and 5% Shareholders                  Number                     Percent(1)
- -------------------------------------------------------       ---------------------         -------------------
Raymon F. and Ladeine A. Thompson(2)....................            6,681,534                      48.9%
Gregory L. Perkins(3)...................................               17,250                       *
Howard E. Bateman(4)....................................                8,875                       *
Richard A. Dasen(4).....................................                7,875                       *
Daniel J. Eigeman(4)....................................                5,775                       *
Calvin S. Robinson(4)...................................                5,625                       *
Ryal R. Poppa(5)........................................                4,500                       *
Timothy C. Dodkin(6)....................................               12,750                       *
James R. Gordley(6).....................................               12,000                       *
Robert W. Berner (7)....................................                9,750                       *
All officers and directors as a group (13 persons)(8)...            7,215,982                      52.5%

</TABLE>



*     Less than 1%.

(1)Beneficial  ownership is  determined  in  accordance  with the rules of the
Securities  and  Exchange   Commission.   In  computing  the  number  of  shares
beneficially  owned by a person and the  percentage  ownership  of that  person,
shares of Common Stock subject to options held by that person that are currently
exercisable  or  exercisable  within  60  days of the  Record  Date  are  deemed
outstanding. Such shares, however, are not deemed outstanding for the purpose of
computing the percentage ownership of each other person.  Except as indicated in
the footnotes to this table and pursuant to applicable  community property laws,
the  persons  named in the table  have sole  voting  and  investment  power with
respect  to the shares set forth  opposite  such  person's  name.  
(2)Includes  318,750 shares held in the name of the Gina Thompson Trust of which
Mr. Thompson is the trustee, and includes 250,000 shares held in the name of the
Raymon F.  Thompson  Charitable  Remainder  Trust of which Mr.  Thompson  is the
trustee.
(3)Represents 17,250 option shares exercisable within 60 days of the Record Date
(4)Includes 4,875 option shares  exercisable  within 60 days of the Record Date.
(5)Represents 4,500 option shares exercisable within 60 days of the Record Date.
(6)Includes  11,250 option shares exercisable within 60 days of the Record Date.
(7)Represents 9,750 option shares exercisable within 60 days of the Record Date.
(8)Includes 92,250 option shares exercisable within 60 days of the Record Date.






<PAGE>


                                 PROPOSAL NO. 2


      APPROVAL AND RATIFICATION OF THE AMENDED AND RESTATED SEMITOOL, INC.
                       1994 STOCK OPTION PLAN, AS AMENDED


The Company's shareholders are being asked to act upon a proposal to approve and
ratify the action of the Board amending the Company's  Amended and Restated 1994
Stock Option Plan (the "Option Plan"). Approval and ratification of the proposal
requires the  affirmative  vote of a majority of the  outstanding  shares of the
Company's Common Stock present in person or represented by proxy and entitled to
vote at the Annual Meeting.


The Board  amended  the Option  Plan in November  1996,  subject to  shareholder
approval and  ratification of the amended Option Plan, to increase the number of
shares  reserved  for  issuance  under the Option  Plan by 200,000  shares  from
900,000 shares to 1,100,000 shares.


The Board believes that the  attraction and retention of high quality  personnel
are  essential  to the  Company's  continued  growth  and  success  and  that an
incentive  plan such as the Option Plan is  necessary  for the Company to remain
competitive in its compensation practices.


                  THE BOARD OF DIRECTORS RECOMMENDS A VOTE FOR
                        APPROVAL AND RATIFICATION OF THE
                            OPTION PLAN, AS AMENDED.

General Description


The  following is a general  description  of the  principal  terms of the Option
Plan,  the  amendment  approved by the Board and the  purpose of the  amendment.
Although the Company  believes  that the following  description  provides a fair
summary of the material terms of the Option Plan,  the  description is qualified
in its entirety by the text of the Option Plan, as proposed to be amended.

The Option Plan was adopted by the Board and approved by the shareholders of the
Company in  December  1994.  The  purpose  of the  Option  Plan is to assist the
Company in  attracting  and  retaining  high quality  personnel and to provide a
means whereby eligible employees (including officers and employee directors) and
non-employee directors can acquire Common Stock through the exercise of options,
thereby  aligning the  interests of employees,  officers and directors  with the
interests  of  shareholders.  The  Option  Plan  provides  for the  granting  to
employees (including officers and employee directors) of incentive stock options
("Incentive  Stock  Options")  within the meaning of Section 422 of the Internal
Revenue Code of 1986, as amended,  and for the granting to employees,  directors
and  consultants  of  nonqualified  stock  options.  The Company cannot grant an
Incentive  Stock Option if as a result of the grant the optionee  would have the
right in any  calendar  year to exercise  (under all plans of the Company or its
affiliates)  for the first time one or more  Incentive  Stock Options for shares
having an  aggregate  fair  market  value  (determined  as of the grant date) in
excess of $100,000. As of the Record Date, approximately 109 persons were either
participating  in or eligible to  participate  in the Option Plan and options to
purchase  765,000 shares had been granted under the Option Plan of which options
to purchase 624,922 shares were outstanding.


The Option Plan is currently  administered by the  Compensation and Stock Option
Committee of the Board (the "Compensation Committee"), which, except for Initial
Option Grants and Annual Option Grants to non-employee directors, determines the
terms of the options  granted  under the Option  Plan,  including  the  exercise
price, the number of shares subject to the option and exercisability. Generally,
5% of the shares  subject to the option  granted  under the Option  Plan  become
exercisable at the end of each three-month  period commencing three months after
the grant date such that the option is fully  exercisable  five years  after the
grant date. No Incentive  Stock Option may be  transferred by the optionee other
than by will or the laws of descent or distribution. Each Incentive Stock Option
may be exercised, during the lifetime of the optionee, only by such optionee.


Under the Option Plan,  non-employee  directors receive Initial Option Grants to
purchase  3,000  shares  of  Common  Stock  upon  the date he or she  becomes  a
director. Thereafter, immediately following each annual meeting of shareholders,
each  non-employee  director who continues as such  following the annual meeting
and has attended  two or more  meetings of the Board of Directors as of the time
of such annual meeting, receives an Annual Option Grant to purchase 2,000 shares
of Common Stock.


The Board of Directors  believes there are  insufficient  shares of Common Stock
currently  available under the Option Plan to satisfy option grants  anticipated
to be effected in 1997.  The  shareholders  of the Company are  therefore  being
asked to approve the Option Plan,  as amended,  to increase the number of shares
of Common Stock available for issuance thereunder by 200,000 shares from 900,000
shares to 1,100,000 shares.


In general, the exercise price of stock subject to the Initial Option Grants and
the Annual  Option  Grants is the fair market  value of the Common  Stock on the
date of grant.  The Initial Option Grants vest and become  exercisable as of the
date of grant and the Annual Option Grants vest and become exercisable as to 25%
of the  shares  covered  thereby  on the  last  day of each  three-month  period
following  the date of grant  such that the  option  becomes  fully  exercisable
twelve months after the grant date.


The exercise price of Incentive Stock Options granted under the Option Plan must
equal at least the fair market  value of the Common  Stock on the date of grant.
The exercise price of any Incentive Stock Option granted to an optionee who owns
stock possessing more than 10% of the voting power of the Company's  outstanding
capital  stock must equal at least 110% of the fair  market  value of the Common
Stock on the date of grant. The Compensation  Committee  determines the exercise
price of nonqualified  stock options other than Initial Option Grants and Annual
Option Grants. In general, payment of the exercise price may be made in cash, by
the optionee's personal check, certified check or other specified consideration.


In general,  except for options  granted to non-employee  directors,  the Option
Plan  provides  that the  Compensation  Committee may include a provision in the
option agreement providing that, in the event of a Change in Control (as defined
in the Option Plan), any outstanding  options covered by such agreement shall be
fully vested, nonforfeitable and become exercisable as of the date of the Change
in Control.  If the  Compensation  Committee elects to include such a provision,
the option  agreement will provide that, (a) in the event of a Change in Control
relating to (i) an  acquisition  of Common  Stock  resulting  in the  beneficial
ownership  by any  person or  related  group of  persons of more than 50% of the
total combined  voting power of the outstanding  Common Stock,  (ii) a change in
the  composition  of the Board over a 36 month  period or (iii)  approval by the
Company's shareholders of any reverse merger in which the Company survives as an
entity,  but in which securities  possessing more than 50% of the total combined
voting power of the Company's outstanding securities are transferred to a person
or persons  different from those who held such securities  immediately  prior to
such merger,  the option shall remain  exercisable for the remaining term of the
option,  and (b) in the event of a Change in Control relating to (x) approval by
the Company's  shareholders of a merger or consolidation in which the Company is
not the  surviving  entity  (except for a transaction  the principal  purpose of
which is to change the Company's state of  incorporation) or (y) the approval by
the Company's  shareholders of either the sale, transfer or other disposition of
all  or  substantially  all of  the  assets  of  the  Company  or  the  complete
liquidation or dissolution of the Company,  the option shall terminate as of the
effective  date  of  such  merger,   disposition   of  assets,   liquidation  or
dissolution.  As to options granted to non-employee directors,  (A) in the event
of a  Change  in  Control  relating  to  (i),  (ii) or  (iii)  above,  any  such
outstanding options become fully vested and remain exercisable for the remaining
term of such options and (B) in the event of a Change in Control relating to (x)
or (y) above, any such outstanding options terminate as of the effective date of
such merger, disposition of assets, liquidation or dissolution.


Federal Income Tax Information


If an option  granted under the Option Plan is an Incentive  Stock  Option,  the
optionee  will  recognize  no income  upon  grant of the option and incur no tax
liability  due to the  exercise of the option  unless the optionee is subject to
alternative minimum tax. The Company will not be allowed a deduction for federal
income tax  purposes as a result of the  exercise of an  Incentive  Stock Option
regardless of the applicability of the alternative minimum tax. Upon the sale or
exchange of the shares at least two years after grant of the option and one year
after exercise of the option, a gain will be treated as long-term  capital gain.
If these holding periods are not satisfied, the optionee will recognize ordinary
income equal to the  difference  between the exercise price and the lower of the
fair  market  value of the stock at the date of the option  exercise or the sale
price of the stock.  The Company  will be  entitled  to a deduction  in the same
amount as the ordinary income recognized by the optionee. Any gain recognized on
such a premature  disposition  of the shares in excess of the amount  treated as
ordinary  income will be  characterized  as  long-term  capital gain if the sale
occurs more than one year after exercise of the option or as short-term  capital
gain if the sale is made  earlier.  Under  current  law,  the maximum  long-term
capital gain tax rate for  individuals is 28% while the maximum  ordinary income
tax rate for individuals is 39.6%.


All options  which do not qualify as Incentive  Stock Options are referred to as
nonqualified stock options. An optionee will not recognize any taxable income at
the time he or she is granted a  nonqualified  stock option.  However,  upon its
exercise,  the optionee will recognize ordinary income for tax purposes measured
by the  excess,  if any,  of the then fair  market  value of the shares over the
exercise  price.  In certain  circumstances,  where the shares are  subject to a
substantial  risk of  forfeiture  when  acquired,  the date of  taxation  may be
deferred unless the optionee files an election with the Internal Revenue Service
under Section  83(b) of the Code within 30 days after the date of exercise.  The
income  recognized by an optionee who is also an employee of the Company will be
subject  to tax  withholding  by the  Company  by  payment of cash or out of the
current  earnings  paid to the  optionee.  Upon  resale  of such  shares  by the
optionee,  any difference  between the sale price and the exercise price, to the
extent not recognized as ordinary income as provided  above,  will be treated as
capital  gain or loss,  and will  qualify  for  long-term  capital  gain or loss
treatment if the shares have been held for more than one year.


The  foregoing is only a summary of the effect of federal  income  taxation upon
the  optionee  and the Company with respect to the grant and exercise of options
under the Option Plan and does not purport to be complete.  The  foregoing  does
not discuss the income tax laws of any  municipality,  state, or foreign country
in which an optionee may reside.





                                 PROPOSAL NO. 3


               RATIFICATION OF APPOINTMENT OF INDEPENDENT AUDITORS


Coopers & Lybrand L.L.P. has served as the Company's  independent auditors since
1984  and  has  been  appointed  by the  Board  to  continue  as  the  Company's
independent auditors for the Company's fiscal year ending September 30, 1997. In
the event that  ratification  of this selection of auditors is not approved by a
majority of the shares of Common Stock voting at the Annual Meeting in person or
by  proxy,   management  will  review  its  future  selection  of  auditors.   A
representative  of Coopers & Lybrand  L.L.P.  is  expected  to be present at the
Annual Meeting.  The representative will have an opportunity to make a statement
and to respond to appropriate questions.


          THE BOARD OF DIRECTORS RECOMMENDS A VOTE FOR RATIFICATION OF
          THE APPOINTMENT OF COOPERS & LYBRAND L.L.P. AS THE COMPANY'S
                    INDEPENDENT AUDITORS FOR THE FISCAL YEAR
                           ENDING SEPTEMBER 30, 1997.



<PAGE>


                  EXECUTIVE COMPENSATION AND OTHER INFORMATION


                           Summary Compensation Table


The following table sets forth information relating to compensation  received by
the Company's Chief Executive Officer and the four other most highly compensated
executive  officers of the Company (the "Named Executive  Officers")  during the
periods indicated.

<TABLE>
<S>                                     <C>         <C>              <C>                <C>                     <C>    


                                                                                        Long-Term
                                                                                       Compensation
                                                                                        Securities
                                                                                        Underlying            All Other
   Name and Principal Position          Year         Salary           Bonus             Options(#)         Compensation(2)
- ----------------------------------     -------     ------------    -------------     -----------------    ------------------
                                                                                                                $4,750
Raymon F. Thompson                      1996        $230,015             --                 --                   4,620
   Chairman, Chief Executive            1995         227,091         $70,000(1)             --                   5,638
   Officer and President                1994         225,001             --                 --

James R. Gordley                        1996         597,449             --                 --                   4,942
   Vice President, Sales,               1995         291,105           2,000(1)           45,000                 4,200
   Thermal Products Division            1994         150,000          28,267(3)             --                   4,080


Timothy C. Dodkin(4)                    1996         228,565          50,000                --                   2,504
   Managing Director, Semitool          1995         208,333          55,000(1)           45,000                 2,534
   Europe Ltd.                          1994         270,414           1,600(3)             --                   1,584


Gregory L. Perkins                      1996         141,180             --                 --                   2,573
   Vice President and General           1995         127,921           70,000(1)          45,000                   920
   Manager                              1994         110,000           15,510(3)            --                   3,193


Robert W. Berner(5)                     1996         140,005              --              15,000                 3,979
   Vice President and
   General Manager, Metallization
   Group

</TABLE>


(1) Includes  bonus amounts paid in fiscal 1996 for services  rendered in fiscal
1995.  
(2)  Represents  Company  contributions  to the Company's  401(k) plan on
behalf of the Named  Executive  Officer,  except  that  amounts  for Mr.  Dodkin
represent  Company  contributions to a United Kingdom employee benefit plan that
is similar to the Company's  401(k) plan on behalf of Mr.  Dodkin.  
(3) Includes  bonus amounts paid in fiscal 1995 for services  rendered in fiscal
1994.
(4) Mr.  Dodkin's  compensation  is paid in UK Pounds  Sterling.  The average UK
Pound Sterling  exchange rates for fiscal 1994, 1995 and 1996 were 1.509,  1.584
and 1.565, respectively.
(5) Mr.  Berner  became an officer of the  Company  during the fiscal year ended
September 30, 1996.



<PAGE>


                        Option Grants in Last Fiscal Year

The following table provides  certain  information with respect to stock options
granted to the Named  Executive  Officers during the fiscal year ended September
30, 1996. In addition,  as required by the  Securities  and Exchange  Commission
rules,  the table sets  forth the  hypothetical  gains that would  exist for the
respective  options based on assumed rates of annual compound price appreciation
during the option term.


<TABLE>
<S>                              <C>            <C>          <C>         <C>           <C>         <C>

                                                Individual Grants
                                ---------------------------------------------------
                                                                                        Potential Realizable
                                 Number of    % of Total                                  Value at Assumed
                                Securities     Options                                  Annual Rate of Stock
                                Underlying    Granted to     Exercise                  Price Appreciation for
                                  Options    Employees in   Price Per   Expiration          Option Term(1)
               Name             Granted(2)   Fiscal Year      Share        Date            5%          10%
                                                                                         
Raymon F. Thompson...........       --           --            --          --              --          --

James R. Gordley.............       --           --            --          --              --          --

Timothy C. Dodkin............       --           --            --          --              --          --

Gregory L. Perkins...........       --           --            --          --              --          --

Robert W. Berner.............     15,000        8.38%         $13.00      1-2-06        $122,634    $310,780
</TABLE>

- -------------------------------

(1) Potential  realizable value is determined by applying an amount equal to the
fair market value on the date of grant to the stated  annual  appreciation  rate
compounded  annually  for the  remaining  term of the  option,  subtracting  the
exercise price at the end of the period and multiplying the remaining  number by
the number of shares  subject to the  option.  Actual  gains,  if any,  on stock
option  exercise  and  Common  Stock  holdings  are  dependent  upon a number of
factors,  including the future  performance  of the Common Stock,  overall stock
market conditions,  and the timing of option exercises,  if any. There can be no
assurance  that the  amounts  reflected  in this  table  will be  achieved.  
(2) Reflects  options that have a ten year term and vest and become  exercisable
at the rate of 5% per quarter.


<PAGE>


                 Aggregated Option Exercises in Last Fiscal Year
                        and Fiscal Year-End Option Values



The following table discloses for each of the Named Executive  Officers  certain
information relating to options to purchase the Company's Common Stock exercised
during the fiscal year ended  September  30,  1996 and  options to purchase  the
Company's Common Stock held at the end of such period.

<TABLE>
<S>                                <C>             <C>           <C>             <C>              <C>             <C>


                                                                     Number of Securities              Value of Unexercised
                                                                    Underlying Unexercised             In-the-Money Options
                                                                   Options at September 30,        at September 30, 1996($)(1)
                                                                            1996(#)
                                                                 ------------------------------    -----------------------------
                                    Shares
                                  Acquired on       Value
                Name              Exercise(#)     Realized($)    Exercisable     Unexercisable    Exercisable      Unexercisable
       -----------------------   ------------     -----------    -----------     -------------    -----------      -------------

       Raymon F. Thompson....          0             $0               0                0               $0               $0
       
       James R. Gordley......          0              0             6,750            29,250          21,654            93,834
       
       Timothy C. Dodkin.....          0              0             6,750            29,250          21,654            93,834

       Gregory L. Perkins....          0              0            12,750            29,250          40,902            93,834
       
       Robert W. Berner......          0              0             6,750            23,250          16,842(2)         31,278(3)

</TABLE>


(1)    Based  on the  fair  market  value of the  Company's  Common  Stock as of
       September  30, 1996  ($11.875  per share),  minus the  exercise  price of
       $8.6667, multiplied by the number of shares underlying the options.
(2)    Of the 6,750  shares  exercisable  at  September  30,  1996,  5,250  were
       in-the-money  with an  exercise  price of $8.6667  per  share,  and 1,500
       shares were not in-the-money with an exercise price of $13.00 per share.
(3)    Of the 23,250 shares not  exercisable  at September 30, 1996,  9,750 were
       in-the-money  with an  exercise  price of $8.6667  per share,  and 13,500
       shares were not in-the-money with an exercise price of $13.00 per share.



Compensation Committee Interlocks and Insider Participation



During the fiscal year ended  September 30, 1996,  Messrs.  Bateman and Robinson
served on the Compensation Committee of the Board of Directors.  No interlocking
relationship  exists  between any member of the Company's  Board of Directors or
Compensation  Committee and any member of the Board of Directors or compensation
committee of any other company,  nor has such interlocking  relationship existed
in the past.





<PAGE>


                      REPORT OF THE COMPENSATION COMMITTEE
                            OF THE BOARD OF DIRECTORS


This  section  is not  "soliciting  material,"  is not deemed  "filed"  with the
Commission  and is not  incorporated  by  reference in any filing of the Company
under the Securities Act of 1933, as amended, or the Securities and Exchange Act
of 1934,  as  amended,  whether  made  before  or  after  the  date  hereof  and
irrespective of any general language to the contrary.


The  Compensation  Committee  of the Board was  formed in 1995 and  consists  of
Messrs.  Bateman and Robinson.  Decisions  concerning  the  compensation  of the
Company's executive officers are made by the Compensation Committee and reviewed
by the full Board (excluding any interested director).


Executive Officer Compensation Programs


The  objectives of the executive  officer  compensation  program are to attract,
retain,  motivate and reward key personnel who possess the necessary  leadership
and  management  skills,  through  competitive  base  salary,  annual cash bonus
incentives,  long-term incentive  compensation in the form of stock options, and
various benefits, including medical and life insurance plans.


The executive  compensation policies of the Compensation  Committee are intended
to combine  competitive  levels of  compensation  and rewards for above  average
performance  and to align relative  compensation  with the  achievements  of key
business  objectives,  optimal  satisfaction of customers,  and  maximization of
shareholder  value. The Compensation  Committee believes that stock ownership by
management is  beneficial  in aligning  management  and  shareholder  interests,
thereby enhancing shareholder value.


Base  Salaries.  Salaries for the Company's  executive  officers are  determined
primarily on the basis of the executive officer's responsibility, general salary
practices of peer  companies and the  officer's  individual  qualifications  and
experience.  The base salaries are reviewed  annually and may be adjusted by the
Compensation  Committee  in  accordance  with  certain  criteria  which  include
individual  performance,  the functions performed by the executive officer,  the
scope  of the  executive  officer's  on-going  duties,  general  changes  in the
compensation peer group in which the Company competes for executive talent,  and
the Company's financial performance generally. The weight given each such factor
by the Compensation Committee may vary from individual to individual.


Incentive  Bonuses.  The Compensation  Committee  believes that a cash incentive
bonus plan can serve to motivate the Company's executive officers and management
to  address  annual   performance  goals,  using  more  immediate  measures  for
performance  than those reflected in the appreciation in value of stock options.
The bonus amounts are based upon  recommendations by management and a subjective
consideration  of factors  including  such  officer's  level of  responsibility,
individual performance, contributions to the Company's success and the Company's
financial performance generally.


Stock Option Grants.  Stock options are granted to executive  officers and other
employees under the Option Plan. Because of the direct relationship  between the
value of an option and the stock price, the Compensation Committee believes that
options  motivate  executive  officers to manage the Company in a manner that is
consistent with shareholder interests. Stock option grants are intended to focus
the attention of the recipient on the Company's long-term  performance which the
Company  believes  results  in  improved  shareholder  value,  and to retain the
services of the  executive  officers in a  competitive  job market by  providing
significant  long-term earning  potential.  To this end, stock options generally
vest and become fully exercisable over a five-year period. The principal factors
considered in granting  stock  options to executive  officers of the Company are
prior performance, level of responsibility, other compensation and the executive
officer's ability to influence the Company's long-term growth and profitability.
However,  the Option Plan does not provide any quantitative method for weighting
these  factors,  and a  decision  to grant an award is  primarily  based  upon a
subjective evaluation of the past as well as future anticipated performance.


Other  Compensation  Plans.  The Company has adopted  certain  general  employee
benefit plans in which executive officers are permitted to participate on parity
with other employees.  The Company also provides a 401(k) deferred  compensation
pension plan.  Benefits  under these general  plans are  indirectly  tied to the
Company's performance.


Deductibility  of  Compensation.  Section  162(m) of the  Internal  Revenue Code
("IRC") disallows a deduction by the Company for certain compensation  exceeding
$1.0 million paid to any Named Executive Officer, excluding, among other things,
certain performance based compensation. Because the compensation figures for the
Named Executive  Officers have not approached the limitation,  the  Compensation
Committee has not had to use any of the available  exemptions from the deduction
limit. However, the Option Plan is designed to qualify any compensation realized
by Named Executive  Officers from the exercise of an option as performance based
compensation.  The Compensation  Committee remains aware of the existence of the
IRC Section 162(m) limitations,  and the available exemptions,  and will address
the issue of  deductibility  when and if  circumstances  warrant the use of such
exemptions in addition to the exemption contemplated under the Option Plan.


Chief Executive Officer Compensation


The compensation of the Chief Executive Officer is reviewed annually on the same
basis as discussed above for all executive officers.  Mr. Thompson's base salary
for the fiscal year ended September 30, 1996 was $230,015.  Mr.  Thompson's base
salary was established in part by comparing the base salaries of chief executive
officers at other  companies of similar size. Mr.  Thompson's base salary was at
the approximate median of the base salary range for  Presidents/Chief  Executive
Officers of comparative  companies.  Mr.  Thompson  received no stock options or
bonuses during the fiscal year ended September 30, 1996.


                                         MEMBERS OF THE COMPENSATION COMMITTEE



                                         Howard E. Bateman
                                         Calvin S. Robinson




<PAGE>


                              CERTAIN TRANSACTIONS

The following is a description of certain transactions and relationships entered
into or existing  during the fiscal year ended  September  30, 1996  between the
Company and certain affiliated  parties.  The Company believes that the terms of
such  transactions  were no less  favorable  to the Company than could have been
obtained from an unaffiliated party.


Pursuant to an agreement,  dated June 7, 1983 (the "Representative  Agreement"),
between  the  Company  and  Entech,  Entech has the right to sell the  Company's
products in Delaware,  Long Island,  New Jersey, New York City and Pennsylvania.
The  Representative  Agreement was terminated by the parties in 1996.  Howard E.
Bateman,  a  director  of the  Company,  formerly  owned  Entech.  Sales  of the
Company's  products by Entech  during the fiscal year ended  September  30, 1996
amounted  to  $1,784,000.   The  terms  of  the  Representative  Agreement  were
negotiated  at arms length  between the Company and Entech prior to Mr.  Bateman
becoming a director of the Company.


During the fiscal  year ended  September  30,  1996,  the  Company  leased,  and
continues  to lease,  airplanes  from  Raymon F.  Thompson.  Under  these  lease
agreements, the Company made rental payments to Raymon F. Thompson of $1,158,000
during the fiscal year ended  September 30, 1996. The Company  currently  leases
four  airplanes  from Mr.  Thompson with an aggregate  monthly  rental charge of
$109,500. One of these lease agreements expires in 1998, one expires in 1999 and
two expire in 2000. The terms of the lease  agreements were based on quotes from
independent aircraft leasing dealers for the same type of aircraft.  The Company
believes  that these  lease  agreements  are on terms no less  favorable  to the
Company than could have been obtained from an unaffiliated party.


Fastener's  West,  Inc.  ("FWI"),  76% of which is owned by Raymon F.  Thompson,
supplies some of the fasteners used by the Company. During the fiscal year ended
September  30,  1996,  total  purchases  by the  Company  from FWI  amounted  to
approximately  $651,000.  Prices paid by the Company are  comparable to the list
price paid by other FWI customers.




<PAGE>


                             STOCK PERFORMANCE GRAPH


The following  graph  compares the  percentage  change in the  cumulative  total
shareholder return on the Company's Common Stock from February 2, 1995, the date
of the  Company's  initial  public  offering,  through the end of the  Company's
fiscal  year  ended  September  30,  1996,  with the  percentage  change  in the
cumulative  total return for the Nasdaq  Composite Index (U.S.  Companies),  the
Hambrecht  & Quist  Technology  Index and the  Hambrecht  & Quist  Semiconductor
Index.  The comparison  assumes an investment of $100 on February 2, 1995 in the
Company's  Common  Stock  and in  each  of the  foregoing  indices  and  assumes
reinvestment of dividends. The stock performance shown on the graph below is not
necessarily indicative of future price performance.


                       STOCK PERFORMANCE GRAPH APEARS HERE





                 COMPARISON OF 20 MONTH CUMULATIVE TOTAL RETURN*
             AMONG SEMITOOL, INC., THE NASDAQ STOCK MARKET-US INDEX,
                     THE HAMBRECHT & QUIST TECHNOLOGY INDEX
                 AND THE HAMBRECHT & QUIST SEMICONDUCTORS INDEX



   Following is a listing of each of the plot points illustrated in the graph:

<TABLE>
<S>                                  <C>          <C>        <C>       <C>       <C>        <C>        <C>       <C>


             DOLLARS                 2/02/95      3/95       6/95      9/95      12/95      3/96       6/96      9/96

SEMITOOL, INC.                         100        162         246       288        150       173        150       137
- -----------------------------------

NASDAQ STOCK MARKET-US                 100        107         123       137        139       146        157       163
- -----------------------------------

HAMBRECHT & QUIST TECHNOLOGY           100        110         134       152        149       152        158       169
- -----------------------------------

HAMBRECHT & QUIST SEMICONDUCTORS       100        115         161       182        132       125        120       136
- -----------------------------------


*    $100 INVESTED ON 2/02/95 IN STOCK OR INDEX-INCLUDING REINVESTMENT OF DIVIDENDS.  FISCAL YEAR ENDING SEPTEMBER
     30.

</TABLE>










<PAGE>


- --------------------------------------------------------------------------------
                              SHAREHOLDER PROPOSALS
- --------------------------------------------------------------------------------


To be  considered  for  presentation  to the  annual  meeting  of the  Company's
shareholders to be held in 1998, a shareholder proposal must be received by John
W. Sullivan,  Chief Financial  Officer,  Vice  President,  Finance and Assistant
Secretary,  655 West Reserve  Drive,  Kalispell,  Montana  59901,  no later than
September 23, 1997.


                                  OTHER MATTERS


Section 16(a) Beneficial  Ownership Reporting  Compliance.  Section 16(a) of the
Exchange Act requires the Company's  directors,  executive  officers and persons
who own more than 10% of the Company's  Common Stock  (collectively,  "Reporting
Persons") to file reports of ownership and changes in ownership of the Company's
Common  Stock.  Reporting  Persons  are  required  by  Securities  and  Exchange
Commission  regulations  to furnish the Company with copies of all Section 16(a)
reports  they file.  Based  solely on its  review of the copies of such  reports
received or written  representations from certain Reporting Persons, the Company
believes  that during the fiscal year ended  September  30, 1996,  all Reporting
Persons complied with all applicable filing requirements.


Other Matters.  The Board of Directors  knows of no other business which will be
presented  at the Annual  Meeting.  If any other  business is  properly  brought
before the Annual Meeting, it is intended that proxies in the enclosed form will
be voted in respect  thereof in  accordance  with the  judgments  of the persons
voting the proxies.


It is  important  that the proxies be returned  promptly and that your shares be
represented.  Shareholders are urged to mark, date,  execute and promptly return
the accompanying proxy card in the enclosed envelope.


                                            By Order of the Board of Directors,




                                           /s/Raymon F. Thompson
                                           Raymon F. Thompson
                                           Chairman of the Board,
                                           Chief Executive Officer and
                                           President


January 21, 1997

Kalispell, Montana



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