<PAGE>   1

                                                                    Exhibit 21.1



                         Subsidiaries of the Registrant

                   Subsidiary
---------------------------------------------------
SpeedFam -- IPEC Corporation ...................... Wholly Owned -- Direct
SpeedFam -- IPEC Precision, Inc. .................. Wholly Owned -- Indirect
SpeedFam -- IPEC Limited .......................... Wholly Owned -- Direct
SpeedFam -- IPEC GmbH ............................. Wholly Owned -- Direct
SpeedFam -- IPEC International Services ........... Wholly Owned -- Indirect
SpeedFam -- IPEC Sales, Inc. ...................... Wholly Owned -- Indirect



© 2022 IncJournal is not affiliated with or endorsed by the U.S. Securities and Exchange Commission