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Exhibit 23.1
[LETTERHEAD OF KPMG]
CONSENT OF KPMG LLP
The Board of Directors
SpeedFam-IPEC, Inc.:
We consent to incorporation by reference in the registration statement on Form
S-3 (No. 333-75965) and Form S-8 (Nos. 33-98026, 33-98566, 33-98568, 333-16891,
333-75969, 333-75967, and 333-75931) of SpeedFam-IPEC, Inc. of our reports
dated June 27, 2000, relating to the consolidated balance sheets of
SpeedFam-IPEC, Inc. and subsidiaries as of June 3, 2000 and May 31, 1999, and
the related consolidated statements of operations, stockholders' equity and
comprehensive income, and cash flows for each of the three fiscal years in the
period from June 1, 1997 to June 3, 2000, and related schedule, and our report
dated June 27, 2000, relating to the consolidated balance sheets of
SpeedFam-IPEC Co., Ltd. and subsidiaries as of April 30, 2000 and 1999, and the
related consolidated statements of operations, stockholders' equity and
comprehensive income, and cash flows for each of the years in the three-year
period ended April 30, 2000, which reports appear in the 2000 annual report on
Form 10-K of SpeedFam-IPEC, Inc.
KPMG LLP
Chicago, Illinois
August 9, 2000
